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12. PHASE COMPOSITION AND ELECTRICAL PROPERTIES OF NITRIDE FILMS OBTAINED ON (111) SI BY THE METHOD OF ION IMPLANTATION

Ignatenko P.I., Yu. B.M. . 2004. . 8. . 34

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: 7 2020, 01:18

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, = 0.953

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, = 0.725

, = 0.869

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, = 0.469

European journal of natural history, = 0.864

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